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【英文标准名称】:StandardPracticeforAnalyticallyDescribingDepth-ProfileandLinescan-ProfileDatabyanExtendedLogisticFunction
【原文标准名称】:用扩展的逻辑函数描述深度剖面和行扫描剖面数据的标准实施规程
【标准号】:ASTME1636-2010
【标准状态】:现行
【国别】:美国
【发布日期】:2010
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:E42.08
【标准类型】:(Practice)
【标准水平】:()
【中文主题词】:
【英文主题词】:depth-profileinterfacedata;linescaninterfacedata;logisticfunction;Compositionanalysis--metals/alloys;Extendedlogisticfunction;Interfaceprofileanalysis;Logisticfunction;SIMS(secondaryionmassspectrometry);Sputterdepthprofilingdata
【摘要】:Informationoninterfacecompositionisfrequentlyobtainedbymeasuringsurfacecompositionwhilethespecimenmaterialisgraduallyremovedbyionbombardment(seeGuideE1127andPracticeE1162).Inthisway,interfacesarerevealedandcharacterizedbythemeasurementofcompositionversusdepthtoobtainasputter-depthprofile.Theshapeofsuchinterfaceprofilescontainsinformationaboutthephysicalandchemicalpropertiesoftheinterfaceregion.Inordertoaccuratelyandunambiguouslydescribethisinterfaceregionandtodetermineitswidth(seeGuideE1438),itishelpfultodefinetheshapeoftheentireinterfaceprofilewithasingleanalyticfunction.Interfacesindepthprofilesfromonesemi-infinitemediumtoanothergenerallyhaveasigmoidalshapecharacteristicofthecumulativelogisticdistribution.Useofsuchalogisticfunctionisphysicallyappropriateandissuperiortootherfunctions(forexample,polynomials)thathaveheretoforebeenusedforinterface-profileanalysisinthatitcontainstheminimumnumberofparametersfordescribinginterfaceshapes.Measurementsofvariationsinsignalintensityorsurfacecompositionasafunctionofpositiononasurfacegiveinformationontheshapeofasteportopographicfeatureonasurfaceoronthesharpnessofaninterfaceataphaseboundary.Theshapesofstepsorotherfeaturesonasurfacecangiveinformationonthelateralresolutionofasurface-analysistechniqueifthesamplebeingmeasuredhassufficientlysharpedges(seeISO18516).Similarly,theshapesofcompositionalvariationsacrossasurfacecangiveinformationonthephysicalandchemicalpropertiesoftheinterfaceregion(forexample,theextentofmixingordiffusionacrosstheinterface).Itisconvenientintheseapplicationstodescribethemeasuredlinescanprofilewithanappropriateanalyticfunction.Althoughthelogisticdistributionisnottheonlyfunctionthatcouldbeusedtodescribemeasuredlinescans,itisphysicallyplausibleandithastheminimumnumberofparametersfordescribingsuchlinescans.Manyattemptshavebeenmadetocharacterizeinterfaceprofileswithgeneralfunctions(suchaspolynomialsorerrorfunctions)butthesehavesufferedfrominstabilitiesandaninabilitytohandlepoorlystructureddata.Choiceofthelogisticfunctionalongwithaspecificallywrittenleast-squaresprocedure(describedinAppendixX1)canprovidestatisticallyevaluatedparametersthatdescribethewidth,asymmetry,anddepthofinterfaceprofilesorlinescansinareproducibleandunambiguousway.1.1Thispracticedescribesasystematicmethodforanalyzingdepth-profileandlinescandataandforaccuratelycharacterizingtheshapeofaninterfaceregionortopographicfeature.Theprofiledataaredescribedwithanappropriateanalyticfunction,andtheparametersofthisfunctiondefinetheposition,width,andanyasymmetryoftheinterfaceorfeature.Theuseofthispracticeisrecommendedinorderthattheshapesofcompositionprofilesofinterfacesoroflinescansoftopographicfeaturesacquiredwithdifferentinstrumentsortechniquescanbeunambiguouslycomparedandinterpreted.1.2Thispracticeisintendedtobeusedfortwopurposes.First,itcanbeusedtodescribetheshapeofdepth-profilesobtainedataninterfacebetweentwodissimilarmaterialsthatmightbemeasuredbycommonsurface-analysistechniquessuchasAugerelectronspectroscopy,secondary-ionmassspectrometry,andX-rayphotoelectronspectroscopy.Second,itcanbeusedtodescribeth......
【中国标准分类号】:A41
【国际标准分类号】:71_040_50
【页数】:8P.;A4
【正文语种】:英语